Thick yttrium-iron-garnet (YIG) films produced by pulsed laser deposition (PLD) for integration applications

作者: H. Buhay , J.D. Adam , M.R. Daniel , N.J. Doyle , M.C. Driver

DOI: 10.1109/20.489787

关键词: FabricationCrystalliteMaterials scienceEpitaxyPulsed laser depositionYttrium iron garnetOptoelectronicsDielectricSemiconductorWafer

摘要: … Next we addressed the need for a Si and GaAs compatible PLD deposition process which would allow device integration. Our initial interest was to develop integrated X-band circulator …

参考文章(6)
A. E. PALADINO, E. A. MAGUIRE, Microstructure Development in Yttrium Iron Garnet Journal of the American Ceramic Society. ,vol. 53, pp. 98- 102 ,(1970) , 10.1111/J.1151-2916.1970.TB12019.X
C.J. Yang, S.W. Kim, Y.S. Kim, Polycrystalline Y/sub 3/Fe/sub 5/O/sub 12/ garnet films grown by a pulsed laser ablation technique IEEE Transactions on Magnetics. ,vol. 30, pp. 4527- 4529 ,(1994) , 10.1109/20.334137
R. Metselaar, M.A.H. Huyberts, The stoichiometry and defect structure of yttrium iron garnet and the nature of the centres active in the photomagnetic effect Journal of Physics and Chemistry of Solids. ,vol. 34, pp. 2257- 2263 ,(1973) , 10.1016/S0022-3697(73)80074-5
P. C. Dorsey, S. E. Bushnell, R. G. Seed, C. Vittoria, Epitaxial yttrium iron garnet films grown by pulsed laser deposition Journal of Applied Physics. ,vol. 74, pp. 1242- 1246 ,(1993) , 10.1063/1.354927
P.C. Dorsey, D.B. Chrisey, J.S. Horwitz, P. Lubitz, R.C.Y. Auyeung, Oriented barium hexaferrite thick films grown on c-plane and m-plane sapphire substrates IEEE Transactions on Magnetics. ,vol. 30, pp. 4512- 4517 ,(1994) , 10.1109/20.334133
J.D. Adam, H. Buhay, M.R. Daniel, M.C. Driver, G.W. Eldridge, M.H. Hanes, R.L. Messham, Monolithic integration of an X-band circulator with GaAs MMICs international microwave symposium. pp. 97- 98 ,(1995) , 10.1109/MWSYM.1995.406089