作者: H. Buhay , J.D. Adam , M.R. Daniel , N.J. Doyle , M.C. Driver
DOI: 10.1109/20.489787
关键词: Fabrication 、 Crystallite 、 Materials science 、 Epitaxy 、 Pulsed laser deposition 、 Yttrium iron garnet 、 Optoelectronics 、 Dielectric 、 Semiconductor 、 Wafer
摘要: … Next we addressed the need for a Si and GaAs compatible PLD deposition process which would allow device integration. Our initial interest was to develop integrated X-band circulator …