Atmospheric low-temperature micro plasma jet device for bio-medical application
作者： Sang Sik Yang , Kang Il Kim , Geun Young Kim
DOI:
关键词: Jet (fluid) 、 Electrode 、 Materials science 、 Cathode 、 Surface micromachining 、 Microelectromechanical systems 、 Plasma 、 Optoelectronics 、 Microplasma 、 Analytical chemistry 、 Anode
摘要: There are provided an atmospheric low-temperature micro plasma jet device for bio-medical application comprising electrode used as anode, a gas injection pipe cathode, porous insulating material, protection pipe, and case manufacturing method therefor using micromachining such microelectromechanical systems (MEMS) in way that diameter of electrodes where is jetted several tens micrometers or less.
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