Structural and optical properties of oxygen to argon flow ratio on the Zn0.98Cr0.02O thin films deposited by RF magnetron sputtering
作者： Chang-Feng Fu , Lian-Fu Han , Jing-Wei Lv , Fa-Mei Wang , Tao Sun
DOI: 10.1007/S10854-015-3756-Y
关键词: Analytical chemistry 、 Photoluminescence 、 Transmittance 、 Thin film 、 Wurtzite crystal structure 、 Scanning electron microscope 、 Sputter deposition 、 Band gap 、 Materials science 、 Crystallite
摘要: High quality polycrystalline Zn0.98Cr0.02O thin films were deposited on glass substrates by RF magnetron sputtering technique. The effects of the gas-flow ratio O2/Ar crystallographic structures and optical properties systemically studied means X-ray diffraction (XRD), scanning electron microscopy (SEM), photoluminescence (PL) ultraviolet–visible transmittance measurements, respectively. XRD patterns show that all with hexagonal wurtzite structure have a preferred orientation c-axis perpendicular to substrate plane. results from SEM images reveal particle size firstly increases then decreases increasing gas flow ratio. In addition, these high in visible light region. And it is found band gap can be enlarged increasing. PL measurements indicate intensity near band-edge emission gradually, whereas defect-level Based results, concluded ratios play key role controlling stoichiometric films.
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