Sputtered barium titanate and barium strontium titanate films for capacitor applications

摘要: Thin barium titanate and strontium films are being developed as dielectric film for use in dc-dc converters. BaTiO/sub 3/ (BT) (BaSr)TiO/sub (BST) capacitor devices were fabricated using RF magnetron sputtering techniques. The typical constant of these capacitors was the range 300 to 690. These had dissipation factors between 0.2% 0.6% before annealing. have breakdown voltages 1/spl times/10/sup 5/ 1.2/spl 6/ V/cm. resistivity 10/sup 13/ 14/ ohm-cm. Annealing significantly increased value constant. also up 2%. capacitance little dependence on frequency from 400 Hz 100 kHz. Thermal cycling temperature 50 300/spl deg/C very limited impact factor. Measurements material properties reported.