Preparation and characterization of sprayed FTO thin films

作者: M. Abd-Lefdil , R. Diaz , H. Bihri , M. Ait Aouaj , F. Rueda

DOI: 10.1051/EPJAP:2007090

关键词: MineralogySheet resistanceAnalytical chemistryScanning electron microscopeMaterials scienceElectrical resistivity and conductivityDopingAnnealing (metallurgy)Tin oxideThin filmTetragonal crystal system

摘要: Fluorine doped tin oxide (FTO) thin films have been prepared by spray pyrolysis technique with no further annealing. Films 2.5% of fluorine grown at 400 °C present a single phase and exhibit tetragonal structure lattice parameters = 4.687 A c 3.160 A. Scanning electron micrographs showed homogeneous surfaces average grain size around 190 nm. The are transparent in the visible zone high reflectance near infrared region. best electrical resistivity was 6.3 × 10 -4  Ω cm for FTO fluorine. ratio transmittance to sheet resistance 0.57 -2 –1.96  Ω -1 range.

参考文章(20)
Chi-Hwan Han, Sang-Do Han, Jihye Gwak, S.P. Khatkar, Synthesis of indium tin oxide (ITO) and fluorine-doped tin oxide (FTO) nano-powder by sol–gel combustion hybrid method Materials Letters. ,vol. 61, pp. 1701- 1703 ,(2007) , 10.1016/J.MATLET.2006.07.114
H Bisht, H.-T Eun, A Mehrtens, M.A Aegerter, Comparison of spray pyrolyzed FTO, ATO and ITO coatings for flat and bent glass substrates Thin Solid Films. ,vol. 351, pp. 109- 114 ,(1999) , 10.1016/S0040-6090(99)00254-0
Seigi Suh, Zuhua Zhang, Wei-Kan Chu, David M. Hoffman, Atmospheric-pressure chemical vapor deposition of fluorine-doped tin oxide thin films Thin Solid Films. ,vol. 345, pp. 240- 243 ,(1999) , 10.1016/S0040-6090(98)01421-7
A. Martel, F. Caballero-Briones, J. Fandiño, R. Castro-Rodrı́guez, P. Bartolo-Pérez, A. Zapata-Navarro, M. Zapata-Torres, J.L. Peña, Discharge diagnosis and controlled deposition of SnOx:F films by DC-reactive sputtering from a metallic tin target Surface & Coatings Technology. ,vol. 122, pp. 136- 142 ,(1999) , 10.1016/S0257-8972(99)00290-X
Kuang-Che Hsiao, Shih-Chieh Liao, Yi-Jia Chen, Synthesis, characterization and photocatalytic property of nanostructured Al-doped ZnO powders prepared by spray pyrolysis Materials Science and Engineering A-structural Materials Properties Microstructure and Processing. ,vol. 447, pp. 71- 76 ,(2007) , 10.1016/J.MSEA.2006.10.116
K. Von Rottkay, M. Rubin, OPTICAL INDICES OF PYROLYTIC TIN-OXIDE GLASS MRS Proceedings. ,vol. 426, pp. 449- ,(1996) , 10.1557/PROC-426-449