Gettering in Silicon
作者： S. A. McHugo , H. Hieslmair
关键词: Condensed matter physics 、 Relaxation (physics) 、 Silicon 、 Solubility 、 Getter 、 Materials science
摘要: The sections in this article are 1 A Brief Overview of Gettering 2 Definition Solubility 3 Relaxation Gettering 4 Segregation Gettering 5 Gettering by Implantation 6 Gettering Simulations
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