A capacitance displacement sensor with elastic diaphragm
作者： P. Roth , E. Gmelin
DOI: 10.1063/1.1143165
关键词: Electrical testing 、 Single crystal 、 Piezoelectricity 、 Elasticity (economics) 、 Deformation (engineering) 、 Materials science 、 Electric field 、 Capacitance 、 Composite material 、 Capacitive transducer
摘要: We have developed a capacitance displacement sensor based on the elastic deformation of 150 μm thick diaphragm made up Cu0.98Be0.02. Displacements to 50 can be detected. The resolution is about 0.1 nm. time dependence dilatation relaxor‐ferroelectric (Sr0.61Ba0.39)Nb2O6 single crystal after removing an electric field investigated using this sensor.
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