Chlorine atom densities in the $(3{\rm p}^{5})^{2} {\rm P}_{1/2}^{\rm o}$ excited spin–orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma

摘要: Chlorine atom densities in the spin–orbit excited state were measured by two-photon absorption laser-induced fluorescence (TALIF) an inductively coupled plasma discharge pure Cl2. The atoms two photons at 235.702 nm to and detected (4s) 4P5/2 726 nm. population of this relative that ground state, was determined from TALIF signal intensity states, combined with new calculations cross-sections. found increase continuously radio-frequency power (50–500 W), whereas Cl2 pressure (5–90 mTorr) it passes through a maximum 10 mTorr, reaching ∼30% 500 W. This corresponds electron density discharge. Combining ratio measurement previous measurements absolute chlorine [1] allows spin-orbit be estimated. A significant fraction total is which should included chemistry models.