Phosphorus Doped Polysilicon for Double Poly Structures I . Morphology and Microstructure
作者： M. Hendriks , C. Mavero
DOI: 10.1149/1.2085808
关键词: Morphology (linguistics) 、 Phosphorus doped 、 Chemical engineering 、 Mineralogy 、 Microstructure 、 Materials science
摘要: … Polysilicon is widely used in integrated circuits for gate electrodes in MOS devices, as … As a standard, the polysilicon is deposited in the crystalline state at a temperature of typically 620~ …
harvard.edu
ecsdl.org参考文章(0)