Design and performance of a piezoelectric actuated precise rotary positioner
作者： Y. C. Wang , S. H. Chang
DOI: 10.1063/1.2336760
关键词: Taguchi methods 、 Design of experiments 、 Actuator 、 Rotary stage 、 Vibration 、 Materials science 、 Finite element method 、 Rotary actuator 、 Mechanical engineering 、 Piezoelectricity
摘要: Industries including semiconductor, biotechnology, and nanotechnology are seeking compact reliable nanometer resolution positioning techniques. To address this demand, article presents a friction-drive rotary stage driven by piezoelectric transducer (PZT) actuator. This includes multilayer PZT actuator, the Scott-Russell mechanism, an actuation stage, preload spring, output shaft. Its is accomplished stick-slip effect between wire electrodischarge-machining Finite element analysis Taguchi optimization method were extensively conducted to analyze displacement, stress, vibration behavior for optimum design. As shown experimental results, achieved of 0.13μrad speed 0.15°∕h tuning spring.
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