Design and implementation of a novel rotary micropositioning system driven by linear voice coil motor
作者： Qingsong Xu
DOI: 10.1063/1.4803187
关键词:
摘要: Limited-angle rotary micropositioning stages are required in precision engineering applications where an ultrahigh-precision rotational motion within a restricted range is needed. This paper presents the design, fabrication, and control of compliant stage dedicated to said applications. To tackle challenge achieving both large compact size, new idea multi-stage compound radial flexure proposed. A devised deliver over 10° while possessing negligible magnitude center shift. The driven by linear voice coil motor its output measured laser displacement sensors. Analytical models derived facilitate parametric which validated conducting finite element analysis. actuation sensing issues addressed guarantee performance. prototype fabricated proportional-integral-derivative implemented achieve precise positioning. Experimental results demonstrate resolution 2 μrad as well low level shift system.
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