Radio frequency power induced changes of structural, morphological, optical and electrical properties of sputtered cadmium oxide thin films

摘要: Abstract Transparent and conducting cadmium oxide (CdO) thin films were deposited on glass substrates at room temperature using radio frequency (RF) magnetron sputtering method. The carrier concentration electron mobility are the key factors for properties of CdO films. grain size, crystallinity, thickness, surface roughness band gap play an important role in optical electrical properties. In this study, dual behaviour is studied as a function RF power. Crystalline quality, micro structure, morphology sputtered investigated. structural analysis revealed that polycrystalline nature with cubic structure ( Fm 3 ¯ m space group). sizes found to be increased increase power from 100 150 W then decreased high (200 W). studies all exhibited higher transmittance visible near infrared region energy value 2.62 2.46 eV Luminescence spectra two strong emission peaks 484 519 nm. resistivity gradually reached minimum 3.041 × 10−4 Ω cm 200 W. A maximum 67.01 cm2/Vs was sample prepared 150 W.