Electrical and optical properties of tin-doped CdO films deposited by atmospheric metalorganic chemical vapor deposition

作者: Zhiyong Zhao , D.L Morel , C.S Ferekides

DOI: 10.1016/S0040-6090(02)00344-9

关键词: TetramethyltinAnnealing (metallurgy)Analytical chemistryCadmium oxideDopingMetalorganic vapour phase epitaxyChemistryMineralogySheet resistanceThin filmChemical vapor deposition

摘要: Highly conductive and transparent tin-doped CdO:Sn were deposited via atmospheric metalorganic chemical vapor deposition. Dimethylcadmium (DMCd), tetramethyltin (TMT), and O 2 …

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