The behaviour of surfaces under ion bombardment

摘要: The processes involved when ions bombard surfaces are divided into two categories: those due to elastic collisions, i.e., sputtering and ion scattering; inelastic leading excitation ionization, resulting in the emission of X-rays, optical photons electrons. mechanisms scattering reviewed detail. experimental energy angular distributions secondary particles considered compared with current theories. effect on erosion effects radiation blistering damage surface topography discussed. Considering incident ions, results for total yields, statistics electron emission, their distribution outlined. X-ray including molecular X-rays other solid state effects, Finally photon de-excitation excited atoms is treated.