3D memory process and structures
作者： Erh-Kun Lai , Chia-Jung Chiu , Chieh Lo
DOI:
关键词: Process (computing) 、 Optoelectronics 、 3d memory 、 Stack (abstract data type) 、 Substrate (printing) 、 Transistor 、 Semiconductor device 、 Materials science 、 Electrical engineering
摘要: A semiconductor device includes a substrate, stack structure and transistor. The substrate first region second region. is formed over the in transistor has gate bottom portion of disposed at height from that less than between structure.
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