作者: Mauro Ferrari , Wen-Hwa Chu
DOI:
关键词: Photolithography 、 Thin film 、 Materials science 、 Mechanical strength 、 Nanotechnology 、 Optoelectronics 、 Fabrication
摘要: Microfabricated filters utilizing a bulk substrate structure and thin film method for constructing such filters. The pores of the are defined by spaces between substantially uniform width, length distribution. width is thickness sacrificial layer therefore may be smaller than limit resolution obtainable with photolithography. provide enhanced mechanical strength, chemical inertness, biological compatibility, throughput. constructed using relatively simple fabrication techniques. Also, microfabricated containment wells capsules immunological isolation cell transplants capsules. large enough to let desired biologically-active molecular product through, while blocking passage all larger molecules. compatibility useful life.