Methodology for Accurate Oxygen Distribution Analysis and Its Application toYBa2Cu3OxThin Films Using16O(α, α)16O3.045 MeV Resonance Reaction

作者: Michio Watamori , Fumiya Shoji , Kenjiro Oura

DOI: 10.1143/JJAP.33.6039

关键词: SuperconductivityResonanceCross section (physics)Limiting oxygen concentrationAnalytical chemistryElastic backscatteringDepth dependenceOxygenMaterials scienceOxygen distributionMolecular physics

摘要: The enhancement factor of oxygen 16O(α, α)16O resonance for a Rutherford backscattering cross section has been investigated using SiO2 films various thicknesses. A new procedure to accurately extract the resonant height from raw spectrum proposed. With this procedure, dependence between film thicknesses and signals investigated, was found agree well with computer simulation within experimental error. Using factor, depth concentration in YBa2Cu3Ox /MgO systems estimated accurately. Estimations accuracy elastic analysis are also given.

参考文章(3)
Michio Watamori, Kenjiro Oura, Fumiya Shoji, Tsutomu Yotsuya, Soichi Ogawa, Teruo Hanawa, High-Energy Ion Beam Analysis of YBa2Cu3OxThin Films Japanese Journal of Applied Physics. ,vol. 28, pp. 346- 350 ,(1989) , 10.1143/JJAP.28.346
Wei-Kan Chu, James W. Mayer, Marc-A. Nicolet, Chapter 3 – Concepts of Backscattering Spectrometry Backscattering Spectrometry. pp. 54- 88 ,(1978) , 10.1016/B978-0-12-173850-1.50008-9