Quantitative analysis of the oxygen content in BaTiO3 films deposited by PLD using 16O(α,α)16O resonant elastic scattering
作者： Wei Li , Fei Lu , Zhi-Guo Liu , Yong Zhu , Feng-Xiang Wang
DOI: 10.1016/S0040-6090(98)01342-X
关键词:
摘要: The resonant elastic scattering 16O(α,α)16O at near 3.045 MeV is a very powerful tool for determining the oxygen concentration in oxide films. resonance yield can be transformed into stoichiometric ratio of to Ba–Ti as function probed depth. By means yield, we obtain BaTiO3 In this work method was used analyze films deposited by pulsed laser deposition (PLD) different ambience. Our experimental results demonstrate that PLD homogeneous, and effect pressure process on significant. It shown our experiment 20 Pa lowest value forming optimum method.
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