Preparation of Nanostructured Magnetic Films by the Plasma Jet Technique
作者： Frantisek Fendrych , Ludek Kraus , Oleksandr Chayka , Peter Lobotka , Ivo Vavra
DOI: 10.1007/978-3-7091-6740-3_3
关键词: Ultra-high vacuum 、 Carbon film 、 Magnetic damping 、 Conductivity 、 Ferromagnetic resonance 、 Chemistry 、 Nuclear magnetic resonance 、 Superparamagnetism 、 Jet (fluid) 、 Magnetoresistance 、 Analytical chemistry
摘要: Magnetic films were prepared by the plasma jet technique from Fe, mumetal, and Fe/Hf or Fe/Ta nozzles. Two different systems with vacuum pumps used to compare quality of produced films. The a Fe nozzle in two equipments shows that oxygen residual atmosphere low reactor leads mainly formation iron oxides. mumetal high system contain only very small amount oxygen, as proved chemical analysis ferromagnetic resonance. film, moreover, good soft magnetic properties damping. For reactive deposition nanogranular Fe-Hf-O Fe-Ta-O films, was used. higher content exhibit tunneling-type conductivity. In some superparamagnetic behaviour spin-dependent tunneling magnetoresistance observed.
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