Thermal mass flow sensor with improved response across fluid types

摘要: One embodiment of the present invention comprises a mass flow controller. The controller may comprise pair thermal sensing elements, bridge circuit adapted to receive at least one first signal from elements and differential amplifier (i) circuit, (ii) emit an output generally proportional rate fluid passing through is also comprised in filter portion control module having or more filters comprising substantially permanent parameters provide accurate for baseline upon change second variable parameters, with each being non-baseline fluids rate.