Method for controlling flow rate of fluid, mass flow rate control device for executing method, and mass flow rate control system utilizing mass flow rate control device

摘要: A control operation of correcting, based on a difference between target value and measured controlled response time, standby time from change in set flow rate to that is not zero until start output an opening signal repeated. As result, for the reach after changes can be desired independently type, rate, temperature, pressure fluid, individual differences among devices, like. The may multiplied by weight coefficient, carried out each predetermined plurality ranges rate.