Flow rate controller and recording medium recorded with program for flow rate controller

作者: Kotaro Takijiri

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摘要: A flow rate controller is provided that includes a setting shaping part that, in the case of receiving an input having discontinuous point at which target value discontinuously changes from first to second value, outputs shaped continuously changing interval inserted place rate; and valve control controls opening so as reduce deviation between measured rate, wherein configured to, depending on magnitude absolute change interval.

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