作者: Masashi Sonoda , Haruaki Ohtsuki
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摘要: A flow control apparatus and a program are disclosed herein. includes piezoelectric element coupled to valve configuring regulating that works the regulate flow, driving circuit applies voltage drive element, an accepting means for target output outputting signal corresponding applied circuit, change so as coincide with flow. When is changed, transiently outputs value different from after change, then converging at value.