Phase Formation Between Iridium Thin Films and Zirconium Carbide Prepared by Spark Plasma Sintering at Relatively Low Temperatures

摘要: Zirconium carbide (ZrC) samples were prepared by spark plasma sintering (SPS), at temperatures of 1700 °C, 1900 °C and 2100 50 MPa for 10 minutes. The phase microstructure after the process was investigated. relative density ZrC ceramic pellets formed measured found to be 96.5 %, 98.9 % 99.5 respectively. grain size calculated it increase from 71.88 nm, 79.15 nm 83.59 as temperature increased hardness 7.40 GPa, 17.00 GPa 18.40 preferred orientation (200) plane. Iridium (Ir) thin films deposited on ceramics electron beam deposition method annealed in vacuum 600 800 2h. composition, solid-state reactions surface morphology investigated grazing incidence x-ray diffraction (GIXRD), scanning microscopy (SEM). XRD used identify phases present as-deposited samples. analysis showed that Ir2Zr initial °C. At Ir reacted with form IrZr. SEM images as-sintered heterogeneous uneven consisting agglomerated granules a few pores. number pores observed reduce temperature. After depositing substrate, structure film followed substrates. annealing Ir-ZrC further agglomeration observed.