作者: S. Dhara
DOI: 10.1080/10408430601187624
关键词: Ion gun 、 Ion beam mixing 、 Focused ion beam 、 Electron beam-induced deposition 、 Ion 、 Ion beam deposition 、 Ion implantation 、 Chemistry 、 Chemical physics 、 Atomic physics 、 Ion beam
摘要: Ion beam irradiation is a potential tool for phase formation and material modification as non-equilibrium technique. Localized rise in temperature ultra fast (∼10−12 s) dissipations of impinging energy make it an attractive metastable formation. As matter fact, major component materials science dominated by ion methods, either synthesis or its characterization. The nanostructures, their technique will be discussed this review article. Formation nanostructures using first. Depending on species (e.g., mass charge state) range, there are various modes energetic to dissipate energy. role the electron also covered article basic principle interaction with matter, which same ion. By simple reactive induced deposition, secondary can nucleated ...