Nonlinear coupling of transverse modes of a fixed–fixed microbeam under direct and parametric excitation

摘要: Tuning of linear frequency and nonlinear response microelectromechanical systems is important in order to obtain high operating bandwidth. Linear tuning can be achieved through various mechanisms such as heating softening due DC voltage. Nonlinear influenced by stiffness, quality factor forcing. In this paper, we present the influence coupling two transverse modes a fixed–fixed microbeam under direct parametric forces near below regions. To do analysis, use equation governing motion along in-plane out-of-plane directions. For given AC forcing, static dynamic equations using Galerkin’s method based on first-mode approximation different resonant conditions. First, consider one-to-one internal resonance condition which frequencies show coupling. Second, case are uncoupled. both conditions, solve with multiple scale (MMS). After validating results obtained MMS numerical simulation modal equation, discuss beam. We also analyzed beams region. found that shows single curve region wider width for low value factor, it curves when high. Consequently, effectively tune forcing types coupled microbeam.