Bottom-up assembly of large-area nanowire resonator arrays

摘要: Directed-assembly of nanowire-based devices1 will enable the development integrated circuits with new functions that extend well beyond mainstream digital logic. For example, nanoelectromechanical resonators are very attractive for chip-based sensor arrays2 because their potential ultrasensitive mass detection3,4,5,6. In this letter, we introduce a bottom-up assembly method to fabricate large-area arrays each having over 2,000 single-nanowire resonators. The nanowires synthesized and chemically functionalized before they onto silicon chip at predetermined locations. Peptide nucleic acid probe molecules attached maintain binding selectivity recognize complementary oligonucleotide targets once resonator array is assembled. two types cantilevered here using rhodium had Q-factors ∼4,500 ∼1,150, respectively, in vacuum. Taken together, these results show nanowire can offer practical alternative top-down fabrication sensitive detection.