Hollow cathode plasma plume

摘要: Sample material is sputtered from an orifice in a disc mounted hollow cathode. A plasma plume ejected the and smaple transported directly into base of plume. Collisions with particles excite material. Light emission absorption are measured ions measured. chamber surrounding maintained at about 1 torr. About 15 cc's per minute argon supplied to cathode 2 The power supply supplies 200 volts 0.10 amps. Low energy strick end tube sputter atoms off aperture. Atoms collide causing excitation, photon ionization which by optical mass spectrometers.