Optical analysis of thin film combinatorial libraries
作者： J.D. Perkins , C.W. Teplin , M.F.A.M van Hest , J.L. Alleman , X. Li
DOI: 10.1016/S0169-4332(03)00917-6
关键词: Spectrometer 、 Reflection (mathematics) 、 Infrared spectroscopy 、 Transmittance 、 Materials science 、 Refractive index 、 Optical coating 、 Fourier transform 、 Thin film 、 Optics
摘要: Abstract We have developed, and are using, optical reflection transmission mapping as a characterization tool for analyzing compositionally graded thin film combinatorial libraries. Measurements cover the spectral range of 200 nm to 25 μm. For UV-Vis–NIR region, multichannel fiber optically coupled CCD array-based spectrometer is used simultaneous mapping. IR, Fourier transform infrared (FTIR) sequential maps. Depending upon type library being analyzed, measured spectra can, with appropriate modeling, be analyzed band gap, thickness, index refraction, plasma frequency, conductivity, carrier scattering time color, in addition simple reflectance transmittance. discuss these techniques using examples taken from our work on both transparent conducting oxides metal nitrides coatings.
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