Study on the phase change material Cr-doped Sb3Te1 for application in phase change memory

作者: Yangyang Xia , Bo Liu , Qing Wang , Zhonghua Zhang , Sannian Song

DOI: 10.1016/J.JNONCRYSOL.2015.05.013

关键词: Crystal structureOrder of magnitudeDiffractionTransmission electron microscopyMaterials scienceAnalytical chemistryDopingCrystallographyPhase-change memoryChemical bondActivation energy

摘要: Abstract The characteristics of Cr-doped Sb 3 Te 1 materials were investigated for application in phase change memory (PCM). crystalline temperature and activation energy films increase with the increasing content Cr doping. X-ray diffraction photoelectron spectra methods applied to analyze crystal structure chemical bonding character. It can be found that there are no new lattice structures appearing, element bonds during process. size grains decreases after doping into by analysis transmission electron microscopy images, which indicates localized infinitesimal area atoms. endurance PCM cell keeps 3 × 10 4  cycles applying SET operation pulse 1 V/100 ns RESET 2 V/30 ns resistance ratio two orders magnitude, reveals good performance low power consumption. 0.37 material is a potential candidate PCM.

参考文章(15)
Robert M. Shelby, Simone Raoux, Crystallization dynamics of nitrogen-doped Ge2Sb2Te5 Journal of Applied Physics. ,vol. 105, pp. 104902- ,(2009) , 10.1063/1.3126501
Simone Raoux, Wojciech Wełnic, Daniele Ielmini, Phase Change Materials and Their Application to Nonvolatile Memories Chemical Reviews. ,vol. 110, pp. 240- 267 ,(2010) , 10.1021/CR900040X
Min Zhu, Liangcai Wu, Feng Rao, Zhitang Song, Xuelai Li, Cheng Peng, Xilin Zhou, Kun Ren, Dongning Yao, Songlin Feng, N-doped Sb2Te phase change materials for higher data retention Journal of Alloys and Compounds. ,vol. 509, pp. 10105- 10109 ,(2011) , 10.1016/J.JALLCOM.2011.08.050
Kun Ren, Feng Rao, Zhitang Song, Shilong Lu, Cheng Peng, Min Zhu, Liangcai Wu, Bo Liu, Songlin Feng, Phase change material W0.04(Sb4Te)0.96 for application in high-speed phase change memory Journal of Alloys and Compounds. ,vol. 594, pp. 82- 86 ,(2014) , 10.1016/J.JALLCOM.2014.01.044
Yan Cheng, Zhitang Song, Yifeng Gu, Sannian Song, Feng Rao, Liangcai Wu, Bo Liu, Songlin Feng, Influence of silicon on the thermally-induced crystallization process of Si-Sb4Te phase change materials Applied Physics Letters. ,vol. 99, pp. 261914- ,(2011) , 10.1063/1.3673281
N. Bai, F.R. Liu, X.X. Han, Z. Zhu, F. Liu, X. Lin, N.X. Sun, A study on the crystallization behavior of Sn-doped amorphous Ge 2 Sb 2 Te 5 by ultraviolet laser radiation Applied Surface Science. ,vol. 316, pp. 202- 206 ,(2014) , 10.1016/J.APSUSC.2014.08.007
Matthias Wuttig, Phase-change materials: towards a universal memory? Nature Materials. ,vol. 4, pp. 265- 266 ,(2005) , 10.1038/NMAT1359
Matthias Wuttig, Noboru Yamada, Phase-change materials for rewriteable data storage Nature Materials. ,vol. 6, pp. 824- 832 ,(2007) , 10.1038/NMAT2009
Yifeng Hu, Mingcheng Sun, Sannian Song, Zhitang Song, Jiwei Zhai, Oxygen-doped Sb4Te phase change films for high-temperature data retention and low-power application Journal of Alloys and Compounds. ,vol. 551, pp. 551- 555 ,(2013) , 10.1016/J.JALLCOM.2012.11.032
Stanford R. Ovshinsky, Reversible Electrical Switching Phenomena in Disordered Structures Physical Review Letters. ,vol. 21, pp. 1450- 1453 ,(1968) , 10.1103/PHYSREVLETT.21.1450