MOCVD (Metal Organic Chemical Vapor Deposition) nanometer nickel coating and preparation device thereof
作者： Nie Lili , Chen Zhaofeng
DOI:
关键词: Metal 、 Chemical vapor deposition 、 Coating 、 Chemical engineering 、 Materials science 、 Nanometre 、 Metalorganic vapour phase epitaxy 、 Nickel Carbonyl 、 Nickel 、 Deposition (phase transition)
摘要: The invention discloses a MOCVD (Metal Organic Chemical Vapor Deposition) nanometer nickel coating and preparation device thereof. is characterized in that the integrates of carbonyl, cracking treatment, Ni(CO)4 generated by reaction powder CO used as precursor, prepared comprises an isometric crystal, atom thickness 1-10nm; reaction, serves carrier carbonyl steam well reactant for generating cracked product; one pipeline connecting deposition alcoholic solution-containing closed container, end extends to top device, other connected contained solution, at upper part solution circularly feeding residual gas into generation device. has advantages effective controlling treating experimental poisonous gases, safety environments operators guaranteed, overall operation simple, recycled, pollution low, efficiency high, cost reduced.
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