Raw material recovery method and trapping mechanism for recovering raw material
作者： Atsushi Gomi , Tatsuo Hatano , Chiaki Yasumuro , Kaoru Yamamoto , Yasushi Mizusawa
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摘要: A raw material recovery method for recovering a of an organic metallic compound, which has the property being stable toward specific refrigerant without decomposed thereby, from exhaust gas discharged treatment container in thin film is formed on surface object to be treated by using source obtained vaporizing characterized provided with solidification step solidifying unreacted cooling bringing into contact and reprecipitating material, separating reprecipitated refrigerant. To provide controlling flow rate so that processing chamber becomes uniform.
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