Reduced temperature scrubbing of effluent gas

摘要: Systems, apparatus and methods are provided involving a reduced-temperature wet scrubbing system adapted to scrub effluent gases within an abatement system. The may include scrubber be operated range of reduced temperatures cooling maintain the temperatures, which is below 23° C. coolant, preferably chilled water, cool scrubber. further indication device, such as temperature sensor, indicate whether range. A controller in communication with device control In addition, baffles nozzles spraying mist along path gas between tool