Reduction of scattering from a glass thin‐film optical waveguide by CO2 laser annealing
作者： Subhadra Dutta , Howard E. Jackson , J. T. Boyd
DOI: 10.1063/1.91994
关键词: Waveguide (optics) 、 Molar absorptivity 、 Materials science 、 Thin film 、 Attenuation coefficient 、 Scattering 、 Sputtering 、 Annealing (glass) 、 Silicon 、 Optics
摘要: … Measurement of the absorption coefficient of … CO2 laser annealing to significantly reduce scattering oflight propagating in a sputtered Corning 7059 glass thin-film waveguide. Scattering …
harvard.edu
scitation.org
aip.org
sci-hub.se 参考文章(5)
M. Lax, Temperature rise induced by a laser beam Journal of Applied Physics. ,vol. 48, pp. 3919- 3924 ,(1977) , 10.1063/1.324265
M. Lax, Temperature rise induced by a laser beam II. The nonlinear case Applied Physics Letters. ,vol. 33, pp. 786- 788 ,(1978) , 10.1063/1.90505
J. Boyd, D. Anderson, Effect of waveguide optical scattering on the integrated optical spectrum analyzer dynamic range IEEE Journal of Quantum Electronics. ,vol. 14, pp. 437- 443 ,(1978) , 10.1109/JQE.1978.1069811
W. Stutius, W. Streifer, Silicon nitride films on silicon for optical waveguides Applied Optics. ,vol. 16, pp. 3218- 3222 ,(1977) , 10.1364/AO.16.003218
M. Gottlieb, G. Brandt, J. Conroy, Out-of-plane scattering in optical waveguides IEEE Transactions on Circuits and Systems. ,vol. 26, pp. 1029- 1035 ,(1979) , 10.1109/TCS.1979.1084604