Fabrication of Storage Capacitance-Enhanced Capacitors with a Rough Electrode
作者： Yoshio Hayashide , Hiroshi Miyatake , Junichi Mitsuhashi , Makoto Hirayama , Takashi Higaki
关键词: Electrode 、 Film capacitor 、 Capacitor 、 Optoelectronics 、 Dram 、 Capacitance 、 Polysilicon depletion effect 、 Materials science 、 Filter capacitor 、 Fabrication 、 General Engineering 、 General Physics and Astronomy
摘要: In order to produce high-performance capacitors with a rough surface polysilicon film as storage electrode, we investigate various fabrication conditions for films. We fabricated such that attained 1.55 times much capacitance those conventional electrode. Capacitors the electrode show almost identical leakage current characteristics of ones. evaluation their reliability, found they have lifetimes more than 1×1010 seconds, which is sufficient next-generation DRAM applications.
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ipap.jp参考文章(2)
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