Probabilistic Weibull behavior and mechanical properties of MEMS brittle materials

摘要: The objective of this work is to present a brief overview probabilistic design methodology for brittle structures, review the literature evidence behavior in mechanical properties MEMS (especially strength), and investigate whether exists that Weibull effect at structural microscale. Since many devices are fabricated from materials, raises question these miniature structures behave similar bulk ceramics. For ceramics, term used indicate significant scatter fracture strength exists, hence requiring rather than deterministic treatment. In addition, material's can be described terms Weakest Link Theory (WLT) leading dependence on component's size (average decreases as increases), geometry/loading configuration (stress distribution). Test methods assess MEMS, especially strength, reviewed. Four materials commonly fabricate reviewed report. These polysilicon, single crystal silicon (SCS), nitride, carbide.