Thin‐Film Characterization Using the Bulge Test
作者： Oliver Paul , Joao Gaspar
DOI: 10.1002/9783527622139.CH3
关键词:
摘要:
sci-hub.se 参考文章(55)
E. Bonnotte, P. Delobelle, L. Bornier, B. Trolard, G. Tribillon, Two interferometric methods for the mechanical characterization of thin films by bulging tests. Application to single crystal of silicon Journal of Materials Research. ,vol. 12, pp. 2234- 2248 ,(1997) , 10.1557/JMR.1997.0299
Torsten Kramer, Oliver Paul, Postbuckled micromachined square membranes under differential pressure Journal of Micromechanics and Microengineering. ,vol. 12, pp. 475- 478 ,(2002) , 10.1088/0960-1317/12/4/322
A Stoffel, A Kovács, W Kronast, B Müller, LPCVD against PECVD for micromechanical applications Journal of Micromechanics and Microengineering. ,vol. 6, pp. 1- 13 ,(1996) , 10.1088/0960-1317/6/1/001
Mark G. Allen, Mehran Mehregany, Roger T. Howe, Stephen D. Senturia, Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films Applied Physics Letters. ,vol. 51, pp. 241- 243 ,(1987) , 10.1063/1.98460
G.F. Cardinale, R.W. Tustison, Fracture strength and biaxial modulus measurement of plasma silicon nitride films Thin Solid Films. ,vol. 207, pp. 126- 130 ,(1992) , 10.1016/0040-6090(92)90112-O
EI Bromley, JN Randall, DC Flanders, RW Mountain, A technique for the determination of stress in thin films Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 1, pp. 1364- 1366 ,(1983) , 10.1116/1.582744
K. Danaie, A. Bosseboeuf, C. Clerc, C. Gousset, G. Julie, Fabrication of UV-transparent SixOyNz membranes with a low frequency PECVD reactor Sensors and Actuators A-physical. ,vol. 99, pp. 78- 81 ,(2002) , 10.1016/S0924-4247(01)00899-8
William D. Nix, Mechanical properties of thin films Metallurgical and Materials Transactions A-physical Metallurgy and Materials Science. ,vol. 20, pp. 2217- 2245 ,(1989) , 10.1007/BF02666659
Jinling Yang, Oliver Paul, Fracture Properties of LPCVD Silicon Nitride Thin Films from the Load-Deflection of Long Membranes Sensors and Actuators A-physical. ,vol. 97, pp. 520- 526 ,(2002) , 10.1016/S0924-4247(02)00049-3
A. J. Kalkman, A. H. Verbruggen, G. C. A. M. Janssen, F. H. Groen, A novel bulge-testing setup for rectangular free-standing thin films Review of Scientific Instruments. ,vol. 70, pp. 4026- 4031 ,(1999) , 10.1063/1.1150029