A technique for the determination of stress in thin films
作者： EI Bromley , JN Randall , DC Flanders , RW Mountain
DOI: 10.1116/1.582744
关键词:
摘要: … the intrinsic stress of thin films deposited onto SiN .. membranes. … of the thin film composite are measured. Experimental data for several thin films in tensile stress deposited onto SiN x …
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