Preparation and Characterization of Plasma Polymerized Methyl Methacrylate Thin Films as Gate Dielectric for Organic Thin Film Transistor
作者： Wei Ao , Jae-Sung Lim , Paik-Kyun Shin
DOI: 10.5370/JEET.2011.6.6.836
关键词: Gate dielectric 、 Dielectric 、 Plasma 、 Thin film 、 Plasma polymerization 、 Thin-film transistor 、 Chemical engineering 、 Polymerization 、 Materials science 、 Methyl methacrylate
摘要: Plasma polymerized methyl methacrylate (ppMMA) thin films were deposited by plasma polymerization technique with different plasma powers and subsequently thermally treated …
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