DEFECT ANALYSIS SUPPORT DEVICE, PROGRAM EXECUTED BY DEFECT ANALYSIS SUPPORT DEVICE, AND DEFECT ANALYSIS SYSTEM
作者： Obara Kenji , Hirai Tomohiro , Nakagaki Akira
DOI:
关键词: Hierarchy (mathematics) 、 Layer (object-oriented design) 、 Computer hardware 、 Image (mathematics) 、 Degree (graph theory) 、 Coincidence 、 Computer science 、 Division (mathematics)
摘要: PROBLEM TO BE SOLVED: To provide a defective image analysis device capable of specifying pattern or layer on which defect occurs by overlapping to be analyzed design layout data, and system improving efficiency work selecting from the data.SOLUTION: A support divides an target for each hierarchy corresponding manufacturing steps create plurality division images (602), determines degree coincidence respective with layers data (604), specifies having highest one among as (605).
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