Method of manufacturing implantable wireless sensor for in vivo pressure measurement
作者： Florent Cros , Matthew Abercrombie , Angad Singh , David O'Brien , Michael Fonseca
DOI:
关键词: Pressure measurement 、 Wafer 、 Optoelectronics 、 Electrical engineering 、 Wireless 、 Materials science 、 Capacitor
摘要: A method of manufacturing a sensor for in vivo applications includes the steps providing two wafers an electrically insulating material. recess is formed first wafer, and capacitor plate wafer. second corresponding region are affixed to one another such that plates arranged parallel, spaced-apart relation.
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