High Temperature Characterization of Ceramic Pressure Sensors

摘要: This work reports functional wireless ceramic micromachined pressure sensors operating at 450 °C, with demonstrated materials and readout capability indicating potential extension to temperatures in excess of 600 °C. These devices are self-packaged actual high-temperature environments, not simulated hot-plate testbeds. A resonant technique is employed, which a planar spiral inductor pressure-sensitive capacitor form passive LC circuit, the resonance frequency sensitive external applied pressure, can be read out using simple loop antenna.