作者: Firat Güder , Elias Frei , Umut M. Kücükbayrak , Andreas Menzel , Ralf Thomann
DOI: 10.1021/AM4042959
关键词: Materials science 、 Methanol 、 Wafer 、 Atomic layer deposition 、 Fabrication 、 Catalysis 、 Deep reactive-ion etching 、 Nanotechnology 、 Catalyst support 、 Energy conversion efficiency
摘要: Catalytically synthesized methanol from H2 and CO2 using porous Cu/ZnO aggregates is a promising, carbon neutral, renewable alternative to replace fossil fuel based transport fuels. However, the absence of surface-engineered model systems understand improve industrial catalyst poses big technological gap in efforts increase conversion efficiency. In this work, we report novel process for fabrication patterned, vertically aligned high aspect ratio 1D nanostructures on Si that can be used as an engineered catalyst. The proposed strategy employs near-field phase shift lithography (NF-PSL), deep reactive ion etching (DRIE), atomic layer deposition (ALD) pattern, etch, coat wafers produce nanostructures. Using method, produced system consisting Cu-decorated ZnO nanotubes (NTs) investigate morphological effects support comparison planar ...