Bringing order to the world of nanowire devices by phase shift lithography.
作者： Kittitat Subannajui , Firat Güder , Margit Zacharias
DOI: 10.1021/NL102103W
关键词:
摘要: Semiconductor nanowire devices have several properties which match future requirements of scaling down the size electronics. In typical microelectronics production, a number microstructures a...
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