Processing of powder surfaces by ion beam techniques
作者： W. Ensinger
DOI: 10.1016/S0168-583X(98)00825-8
关键词: Ion beam 、 Optoelectronics 、 Electron beam-induced deposition 、 Ion beam deposition 、 Ion plating 、 Ion beam mixing 、 Metallurgy 、 Focused ion beam 、 Ion implantation 、 Ion beam-assisted deposition 、 Materials science
摘要: Abstract Owing to their large surface-to-bulk ratio, powders are a useful material for number of applications. Their properties can be influenced when the surface is modified. This achieved by ion beam techniques. In order overcome line-of-sight restriction methods, powder has agitated in beam. Various devices processing powders, including implantation, sputter deposition, and assisted listed. Recent results on deposition platinum alumina tungsten carbide cobalt silicide silicon using rotating wing-drum spiral tube presented.
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