Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching

摘要: Abstract Recent progress in manufacturing now enables the efficient fabrication of complex oxide-glass components at micrometer– to sub-micrometer scale. This benefits both industry and fundamental research as such miniature glass parts have numerous applications. However, these length-scales, mechanical properties glasses can no longer be predicted based on bulk material characteristics. Here it is shown that fused silica micro-pillars fabricated by laser-assisted etching are almost ten times stronger than their bulk-sized counterparts. The relatively rough surface typical for this process does not much impair strength. Additionally, demonstrated annealing as-fabricated structures 1200 °C air results significantly smoother surfaces. accompanying increase strength from approximately 8 GPa 10 due reduction stress concentrations surface, finite element simulations. It also gain resistance downsizing occurs already large 20 µm – orders magnitude above critical size reported other micro-mechanical effects. These selective structured key a reliable use micro-components.