The deposition of BaFe12O19 by metalorganic chemical vapor deposition
作者： Edward J. Donahue , Donald M. Schleich
DOI: 10.1063/1.350456
关键词: Chemical engineering 、 Deposition (phase transition) 、 Chemical vapor deposition 、 Inorganic chemistry 、 Metalorganic vapour phase epitaxy 、 Oxide 、 Thin film 、 Crystallinity 、 Combustion chemical vapor deposition 、 Chemistry 、 Carbon film
摘要: We report the first successful use of metalorganic chemical vapor deposition (MOCVD) in fabrication ferromagnetic oxide thin films. A substituted acetylacetonate barium complex has been used with ferrocene a horizontal hot wall MOCVD system to deposit both polycrystalline and c‐axis preferred films BaFe12O19. These were examined for crystallinity, morphology, composition, magnetic properties. Their properties found be consistent prepared by other techniques.
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