Characterization of indirect and direct interband transitions of anatase TiO2 by thermoreflectance spectroscopy
作者： Ching-Hwa Ho , Ming-Cheng Tsai , Ming-Show Wong
DOI: 10.1063/1.2975846
关键词: Deposition (law) 、 Atmospheric temperature range 、 Materials science 、 Spectral line 、 Wide-bandgap semiconductor 、 Analytical chemistry 、 Tetragonal crystal system 、 Anatase 、 Spectroscopy 、 Condensed matter physics 、 Anisotropy
摘要: We characterize three as-deposited anatase TiO2 (a-TiO2) films with different deposition flux angles of 0°, 53°, and 86° tilted to Si ⟨001⟩ using thermoreflectance (TR) measurement in the temperature range between 30 300 K. The TR spectra at low clearly show considerable difference interband transitions tetragonal a-TiO2 largely top plane {001} or side planes {100} {010}. indirect direct are evaluated. dependences transition energies analyzed. optical-axial anisotropy is discussed.
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