Development of a microfabricated scanning endoscope using SU-8-based optical waveguide

摘要: Flexible medical endoscopes currently used in medicine have many problems and a fundamental tradeoffs. Either resolution or field of view is sacrificed when the scope diameter less than 3mm, since minimum pixel size usually at least 4 microns pixel-array such as camera fiber bundle. Previous work has shown design micromachined cantilever beam able to realize 100μm wide, one dimension scanning pattern. First mode resonances scanner are found between 16-52 kHz with response amplitudes ranging from 62.5 420 μm. Since waveguides resonant frequencies above 20 potentially suitable for video rate scanning, these devices may be image acquisition display. Described this an alternative method micro-optical endoscope. The endoscope consists optical waveguide microfabricated using SU-8 photoresist. high contrast, negative tone, chemically amplified, epoxy based photoresist chosen its aspect ratio (~15:1) imaging near vertical sidewalls. With use SU-8, we were fabricate much larger (~85 μm) compared previous silicon oxide (~3 An overall device makes coupling into easier increases amount light coupled beams. neagactively toned resin also durability simplifies fabrication process.