Out-of-plane microlens array fabricated using ultraviolet lithography
作者： Ren Yang , Wanjun Wang , Steven A. Soper
DOI: 10.1063/1.1901829
关键词:
摘要: This letter describes a three-dimensional ultraviolet-lithography (UV-lithography) process for fabricating an out-of-plane microlens array that can be prealigned with other optical components in integrated bench or easily into microfluidic devices. is fabricated unique UV-lithography technique, and the desired surface profiles are obtained from top rows to lower rows. The microlens’ focal lengths, diameters of pads, depths focus, measured reported herein. another on same substrate obtain truly free-space bench. In addition, fill factor this approaches 100%.
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